ISSM 2006 : conference proceedings : the thirteenth [i.e. fifteenth] international symposium on semiconductor manufacturing : September 25-27, 2006 : Century Hyatt Tokyo : Tokyo, Japan. : ISSM2006 : 15th annual ISSM conference : Sep 2006, Tokyo, Japan.

• Material Type: 図書
• ISBN: 9784990413804
• Title: ISSM 2006 : conference proceedings : the thirteenth [i.e. fifteenth] international symposium on semiconductor manufacturing : September 25-27, 2006 : Century Hyatt Tokyo : Tokyo, Japan. : ISSM2006 : 15th annual ISSM conference : Sep 2006, Tokyo, Japan.
• Author Heading: International Symposium on Semiconductor Manufacturing (2006 : Tokyo, Japan)
• Publication, Distribution, etc.: Tokyo : Semiconductor Portal, Inc.
• Publication Date: c2006.
• Publication Date (W3CDTF): 2006
• Extent: lxiii, 504 p : ill. ; 28 cm.
• Alternative Title: ISSM 2006 : conference proceedings : the 13th [i.e. 15th] international symposium on semiconductor manufacturing : September 25-27, 2006 : Century Hyatt Tokyo : Tokyo, Japan; 2006 IEEE international symposium on semiconductor manufacturing : Tokyo, Japan : 25-27 September 2006
• Place of Publication (Country Code): JP
• Text Language Code: mul
• Note (Text Language): Text in English and Japanese.
• Subject Heading: Semiconductors -- Design and construction -- Congresses.; Semiconductor industry -- Congresses.; Computer integrated manufacturing systems -- Congresses.
• NDLC: M17
• Note (General): Program, papers, presentations and abstracts.; IEEE cat no 06CH37838 (t.p. verso) , CFP06SSM-PRT (cover & spine) .
• Note (Bibliography): Includes bibliographical references.
• Holding library: 国立国会図書館
• Call No.: M17-09-1632
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000010112159; http://id.ndl.go.jp/bib/000010112159
• OCLC No.: 288960981; https://www.worldcat.org/oclc/288960981
• Bibliographic Record Category (NDL): 215