Experimental study of the behavior of point defects and dopants in silicon using isotope superlattices

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Material Type: 博士論文
Title: Experimental study of the behavior of point defects and dopants in silicon using isotope superlattices
Author/Editor: Yasuo Shimizu [著]
Author Heading: 清水, 康雄シミズ, ヤスオ
Publication, Distribution, etc.: [Yasuo Shimizu]
Publication Date: [2009]
Publication Date (W3CDTF): 2009
Extent: 1冊
Alternative Title: 同位体超格子を用いたシリコン中の点欠陥と不純物の挙動に関する実験的研究ドウイタイチョウコウシオモチイタシリコンチュウノテンケッカントフジュンブツノキョドウニカンスルジッケンテキケンキュウ
Degree grantor/type: 慶應義塾大学
Date Granted: 平成21年3月23日
Date Granted (W3CDTF): 2009
Dissertation Number: 甲第3033号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2009-D787
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010333249
http://id.ndl.go.jp/bib/000010333249
Bibliographic Record Category (NDL): 213