Development of quartz MEMS microfabrication technologies and their application to capacitive tilt sensors

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Material Type: 博士論文
Title: Development of quartz MEMS microfabrication technologies and their application to capacitive tilt sensors
Author/Editor: Jinxing Liang [著]
Author Heading: 梁, 金星リャン, ジンシン
Publication, Distribution, etc.: [Jinxing Liang]
Publication Date: [2008]
Publication Date (W3CDTF): 2008
Extent: 1冊
Alternative Title: 水晶MEMSマイクロ加工技術とその傾斜センサへの応用に関する研究開発スイショウ MEMS マイクロカコウギジュツトソノケイシャセンサエノオウヨウニカンスルケンキュウカイハツ
Degree grantor/type: 早稲田大学
Date Granted: 平成20年9月15日
Date Granted (W3CDTF): 2008
Dissertation Number: 甲第2672号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
Alias of Author: Liang, Jinxing
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2009-E17
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010367279
http://id.ndl.go.jp/bib/000010367279
Bibliographic Record Category (NDL): 213