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- Material Type
- 図書
- ISBN
- 978-4-904080-30-6
- Title Transcription
- サブミクロン ナノレベル ノ フンサイ ブンサン ギジュツ ト プロセス ノ コウジョウ
- Author Heading
- 情報機構 ジョウホウ キコウ ( 01171002 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2009.7
- Publication Date (W3CDTF)
- 2009
- Extent
- 508p
- Size
- 27cm