Smart sensors, actuators, and MEMS 4 : 4-6 May 2009 : Dresden, Germany. : conference 'smart sensors, actuators and MEMS' : May 2009, Dresden, Germany.

• Material Type: 図書
• ISBN: 9780819476364
• ISSN (series): 0277-786X
• Title: Smart sensors, actuators, and MEMS 4 : 4-6 May 2009 : Dresden, Germany. : conference 'smart sensors, actuators and MEMS' : May 2009, Dresden, Germany.
• Series Title: SPIE Proceedings ; 7362
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7362.
• Author Heading: SPIE - International Society for Optical Engineering.; Schmid, Ulrich, Prof.; Cané, Carles.; Shea, Herbert R.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2009.
• Publication Date (W3CDTF): 2009
• Extent: 1 v. (various pagings) : ill. ; 28 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Microelectromechanical systems -- Congresses.; Microtechnology -- Congresses.; Actuators -- Industrial applications -- Congresses.; Detectors -- Industrial applications -- Congresses.; Scanning systems -- Congresses.
• LCC: QC350
• NDLC: M17
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-10-826
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000010556089; http://id.ndl.go.jp/bib/000010556089
• OCLC No.: 436073742; https://www.worldcat.org/oclc/436073742
• Bibliographic Record Category (NDL): 215