環境調和型半導体用洗浄技術の研究

環境調和型半導体用洗浄技術の研究

Call No. (NDL): UT51-2009-K237
Bibliographic ID of National Diet Library: 000010597941

Material type: 博士論文

Author: 速水直哉 [著]

Publisher: [速水直哉]

Publication date: [2009]

Material Format: Paper

Capacity, size, etc.: 1冊

Name of awarding university/degree: 横浜国立大学,博士 (学術)

Notes on use

Note (General)：: 博士論文

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Paper

Material Type: 博士論文
Title: 環境調和型半導体用洗浄技術の研究
Title Transcription: カンキョウチョウワガタハンドウタイヨウセンジョウギジュツノケンキュウ
Author/Editor: 速水直哉 [著]
Author Heading: 速水, 直哉ハヤミズ, ナオヤ
Publication, Distribution, etc.: [速水直哉]
Publication Date: [2009]
Publication Date (W3CDTF): 2009
Extent: 1冊
Alternative Title: Environment-conscious cleaning method for semiconductor
Degree grantor/type: 横浜国立大学
Date Granted: 平成21年3月26日
Date Granted (W3CDTF): 2009
Dissertation Number: 乙第327号
Degree Type: 博士 (学術)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2009-K237
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010597941
http://id.ndl.go.jp/bib/000010597941
Bibliographic Record Category (NDL): 213