Analytical techniques for semiconductor materials and process characterization 6 : (ALTECH 2009). : ALTECH 2009 symposium on "analytical techniques for semiconductor materials and process characterization 6" : 216th meeting of the Electrochemical Society : ECS Vienna meeting : Oct 2009, Vienna, Austria. (ECS Transactions ; 25 (no. 3))

Analytical techniques for semiconductor materials and process characterization 6 : (ALTECH 2009). : ALTECH 2009 symposium on "analytical techniques for semiconductor materials and process characterization 6" : 216th meeting of the Electrochemical Society : ECS Vienna meeting : Oct 2009, Vienna, Austria.

(ECS Transactions ; 25 (no. 3))

Call No. (NDL): M17-10-1626
Bibliographic ID of National Diet Library: 000010654173

Material type: 図書

Author: Electrochemical Society. Electronics and Photonics Division. European Committee.

Publisher: Electrochemical Society

Publication date: c2009.

Material Format: Paper

Capacity, size, etc.: x, 465 p. : ill. ; 24 cm.

NDC: -

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Note (General)：: Papers."The ALTECH 2009 symposium (...) It is the sixth symposium in a series of symposia (...) " -- pref.

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Paper

Material Type: 図書
ISBN: 9781566777407 (Hardcover)
9781607680901 (PDF)
ISSN: 1938-6737 (online)
ISSN (series): 1938-5862 (print)
Title: Analytical techniques for semiconductor materials and process characterization 6 : (ALTECH 2009). : ALTECH 2009 symposium on "analytical techniques for semiconductor materials and process characterization 6" : 216th meeting of the Electrochemical Society : ECS Vienna meeting : Oct 2009, Vienna, Austria.
Series Title: ECS Transactions ; 25 (no. 3)
Author Heading: Electrochemical Society. Electronics and Photonics Division. European Committee.
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2009.
Publication Date (W3CDTF): 2009
Extent: x, 465 p. : ill. ; 24 cm.
Alternative Title: Dielectric and semiconductor materials, devices, and processing
Place of Publication (Country Code): US
NDLC: M17
Note (General): Papers.
"The ALTECH 2009 symposium (...) It is the sixth symposium in a series of symposia (...) " -- pref.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-10-1626
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010654173
http://id.ndl.go.jp/bib/000010654173
Bibliographic Record Category (NDL): 215