2009 IEEE/SEMI advanced semiconductor manufacturing conference : (ASMC) : Berlin, Germany : 10-12 May 2009. : 20th annual IEEE/SEMI advanced semiconductor manufacturing conference : May 2009, Berlin, Germany.

• Material Type: 図書
• ISBN: 9781424436149
• ISSN: 1078-8743
• Title: 2009 IEEE/SEMI advanced semiconductor manufacturing conference : (ASMC) : Berlin, Germany : 10-12 May 2009. : 20th annual IEEE/SEMI advanced semiconductor manufacturing conference : May 2009, Berlin, Germany.
• Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (20th : 2009 : Berlin, Germany)
• Publication, Distribution, etc.: Piscataway : IEEE
• Publication Date: c2009.
• Publication Date (W3CDTF): 2009
• Extent: 262 p. : ill. ; 28 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Process control -- Congresses.; Power semiconductors -- Congresses.; Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.
• LCC: TK7871.85
• NDLC: M17
• Note (General): Papers.; IEEE cat no CFP09ASC-PRT.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-10-2049
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000010696630; http://id.ndl.go.jp/bib/000010696630
• OCLC No.: 613471004; https://www.worldcat.org/oclc/613471004
• Bibliographic Record Category (NDL): 215