Study on proton dynamics and reaction of acid generators with thermalized electrons in acid generation processes in thin resist films

Call No. (NDL): UT51-2010-C391
Bibliographic ID of National Diet Library: 000010922943

Material type: 博士論文

Author: Kenichiro Natsuda [著]

Publisher: [Kenichiro Natsuda]

Publication date: [2010]

Material Format: Paper

Capacity, size, etc.: 1冊

Name of awarding university/degree: 大阪大学,博士 (工学)

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Note (General)：: 博士論文

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Paper

Material Type: 博士論文
Title: Study on proton dynamics and reaction of acid generators with thermalized electrons in acid generation processes in thin resist films
Author/Editor: Kenichiro Natsuda [著]
Author Heading: 平澤, 健一郎ヒラサワ, ケンイチロウ
夏田, 健一郎ナツダ, ケンイチロウ
Publication, Distribution, etc.: [Kenichiro Natsuda]
Publication Date: [2010]
Publication Date (W3CDTF): 2010
Note (Publication, distribution, etc.): 授与名簿の責任表示: 平澤健一郎
Extent: 1冊
Alternative Title: レジスト薄膜中の酸生成過程におけるプロトンダイナミクスおよび酸発生剤と熱化電子の反応に関する研究レジストハクマクチュウノサンセイセイカテイニオケルプロトンダイナミクスオヨビサンハッセイザイトネツカデンシノハンノウニカンスルケンキュウ
Degree grantor/type: 大阪大学
Date Granted: 平成22年3月23日
Date Granted (W3CDTF): 2010
Dissertation Number: 甲第14205号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2010-C391
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010922943
http://id.ndl.go.jp/bib/000010922943
Bibliographic Record Category (NDL): 213