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図書

41st R[3]-Nordic symposium : cleanroom technology, contamination control and cleaning : Dipoli, Espoo, Finland, May 25-26, 2010. : annual R[3]-Nordic symposium : May 2010, Espoo, Finland. (VTT Symposium ; 266)

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41st R[3]-Nordic symposium : cleanroom technology, contamination control and cleaning : Dipoli, Espoo, Finland, May 25-26, 2010. : annual R[3]-Nordic symposium : May 2010, Espoo, Finland.

(VTT Symposium ; 266)

Call No. (NDL)
M17-10-3445
Bibliographic ID of National Diet Library
000010925522
Material type
図書
Author
Nordic Society of Cleanroom Technology.ほか
Publisher
VTT
Publication date
c2010.
Material Format
Paper
Capacity, size, etc.
223 p. : ill. (some col.) ; 25 cm.
NDC
-
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Paper

Material Type
図書
ISBN
9789513875954 (soft back ed.)
9789513875961 (URL:http://www.vtt.fi/publications/index.jsp)
ISSN
1455-0873 (URL:http://www.vtt.fi/publications/index.jsp)
ISSN (series)
0357-9387 (soft back ed.)
Title
41st R[3]-Nordic symposium : cleanroom technology, contamination control and cleaning : Dipoli, Espoo, Finland, May 25-26, 2010. : annual R[3]-Nordic symposium : May 2010, Espoo, Finland.
Series Title
VTT Symposium ; 266
Title Heading
VTT symposium ; 266.
Author Heading
Nordic Society of Cleanroom Technology.
Wirtanen, Gun.
Satu, Salo.
R[3]-Nordic Sympo (41st : 2010 : Dipoli, Espoo, Finland)
Publication, Distribution, etc.
[Espoo] : VTT
Publication Date
c2010.