Microelectromechanical systems -- materials and devices 3 : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices 3" : 2009 MRS fall meeting : Nov 2009, Boston, MA. (Materials Research Society Symposia Proceedings ; 1222)

Microelectromechanical systems -- materials and devices 3 : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices 3" : 2009 MRS fall meeting : Nov 2009, Boston, MA.

(Materials Research Society Symposia Proceedings ; 1222)

Call No. (NDL): M17-10-3898
Bibliographic ID of National Diet Library: 000010963424

Material type: 図書

Author: Bagdahn, Jörg.ほか

Publisher: Materials Research Society

Publication date: c2010.

Material Format: Paper

Capacity, size, etc.: ix, 211 p. : ill. ; 24 cm.

NDC: -

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Note (General)：: Papers."One of these papers was presented during a joint session with Symposium FF, 'Mechanical Behavior of Nanomaterials -- Experiments and Modeling,...

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Paper

Material Type: 図書
ISBN: 9781605111957
Title: Microelectromechanical systems -- materials and devices 3 : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices 3" : 2009 MRS fall meeting : Nov 2009, Boston, MA.
Series Title: Materials Research Society Symposia Proceedings ; 1222
Title Heading: Materials Research Society symposia proceedings ; v. 1222.
Author Heading: Bagdahn, Jörg.
Materials Research Society. Meeting (2009 : Boston, Mass.)
Symposium DD, "Microelectromechanical Systems -- Materials and Devices III" (2009 : Boston, Mass.)
Publication, Distribution, etc.: Warrendale : Materials Research Society
Publication Date: c2010.
Publication Date (W3CDTF): 2010
Extent: ix, 211 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectromechanical systems -- Materials -- Congresses.
Microelectromechanical systems -- Congresses.
Thin films -- Congresses.
Nanostructured materials -- Congresses.
Silicon -- Congresses.
NDLC: M17
Note (General): Papers.
"One of these papers was presented during a joint session with Symposium FF, 'Mechanical Behavior of Nanomaterials -- Experiments and Modeling, ' (...) " -- pref.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-10-3898
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010963424
http://id.ndl.go.jp/bib/000010963424
OCLC No.: 646292092
https://www.worldcat.org/oclc/646292092
Bibliographic Record Category (NDL): 215