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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- マイクロ デンキ キカイ システムヨウ ヒカリ リソグラフィ ギジュツ ニ カンスル ケンキュウ
- Author/Editor
- 小林宏史 [著]
- Author Heading
- 小林, 宏史 コバヤシ, ヒロシ
- Publication, Distribution, etc.
- Publication Date
- [2009]
- Publication Date (W3CDTF)
- 2009
- Extent
- 1冊
- Alternative Title
- Research on optical lithography appropriate to print patterns for micro electro mechanical systems