博士論文

Electrical, optical and structural characterization of extended defects in 4H-SiC films and multicrystalline Si

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Electrical, optical and structural characterization of extended defects in 4H-SiC films and multicrystalline Si

Call No. (NDL)
UT51-2010-L19
Bibliographic ID of National Diet Library
000011050581
Material type
博士論文
Author
Bin Chen [著]
Publisher
[Bin Chen]
Publication date
[2009]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
筑波大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Bin Chen [著]
Author Heading
陳, 斌 チェン, ビン
Publication, Distribution, etc.
Publication Date
[2009]
Publication Date (W3CDTF)
2009
Extent
1冊
Alternative Title
4H-SiC薄膜と多結晶Si中の拡張欠陥の電気的・光学的・構造学的評価 4H-SiC ハクマク ト タケッショウ Siチュウ ノ カクチョウ ケッカン ノ デンキテキ コウガクテキ コウゾウガクテキ ヒョウカ
Degree grantor/type
筑波大学