Advanced laser applications for new process technologies and diagnostics of reactive plasmas

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Material Type: 博士論文
Title: Advanced laser applications for new process technologies and diagnostics of reactive plasmas
Author/Editor: Tsuyoshi Yamaguchi [著]
Author Heading: 山口, 剛ヤマグチ, ツヨシ
Publication, Distribution, etc.: [Tsuyoshi Yamaguchi]
Publication Date: [2011]
Publication Date (W3CDTF): 2011
Extent: 1冊
Alternative Title: 反応性プラズマの新プロセス技術と気相診断のための先進レーザ応用ハンノウセイプラズマノシンプロセスギジュツトキソウシンダンノタメノセンシンレーザオウヨウ
Degree grantor/type: 名古屋大学
Date Granted: 平成23年3月25日
Date Granted (W3CDTF): 2011
Dissertation Number: 甲第9220号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2011-B835
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000011213505
http://id.ndl.go.jp/bib/000011213505
Bibliographic Record Category (NDL): 213