Alternative lithographic technologies 3 : 1-3 March 2011 : San Jose, California, United States : alternative lithographic technologies 3 conference : Mar 2011, San Jose, CA.

• Material Type: 図書
• ISBN: 9780819485298 (pbk.)
• ISSN (series): 0277786X
• Title: Alternative lithographic technologies 3 : 1-3 March 2011 : San Jose, California, United States : alternative lithographic technologies 3 conference : Mar 2011, San Jose, CA.
• Series Title: SPIE Proceedings ; 7970
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7970.
• Author Heading: Herr, Daniel J. C.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2011.
• Publication Date (W3CDTF): 2011
• Extent: 1 v. (various pagings)
• Other physical details: ill. (some col.)
• Size: 28 cm.
• Additional Title: SPIE advanced lithography.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Extreme ultraviolet lithography--Congresses.; Lithography, Electron beam--Congresses.; Microlithography--Industrial applications--Congresses.; Masks (Electronics)--Congresses.; Alternative lithographic technologies; Lithographic technologies; SPIE
• LCC: TK7872.M3
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-12-323
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000011254277; http://id.ndl.go.jp/bib/000011254277
• OCLC No.: 751794121; https://www.worldcat.org/oclc/751794121
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 215