Optical microlithography 24 : 1-3 March 2011 : San Jose, California, United States : Mar 2011, San Jose, CA. (SPIE Proceedings ; 7973)

Optical microlithography 24 : 1-3 March 2011 : San Jose, California, United States : Mar 2011, San Jose, CA.

(SPIE Proceedings ; 7973)

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Material Type: 図書
ISBN (set): 9780819485328 (set)
ISSN (series): 0277786X
Title: Optical microlithography 24 : 1-3 March 2011 : San Jose, California, United States : Mar 2011, San Jose, CA.
Series Title: SPIE Proceedings ; 7973
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7973. 0277-786X
Author Heading: Dusa, Mircea V.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2011.
Publication Date (W3CDTF): 2011
Extent: 2 parts
Other physical details: ill.
Size: 28 cm.
Additional Title: SPIE advanced lithography.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits--Masks--Congresses.
Microlithography--Congresses.
X-ray lithography--Congresses.
Manufacturing processes--Congresses.
LCC: TK7835
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Source: http://link.spie.org/PSISDG/7973/1
Holding library: 国立国会図書館
Call No.: M17-12-325
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000011254300
http://id.ndl.go.jp/bib/000011254300
OCLC No.: 746732657
https://www.worldcat.org/oclc/746732657
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215