Modeling aspects in optical metrology 3 : 23-24 May 2011 : Munich, Germany : conference modelling aspects in optical metrology : SPIE optical metrology symposium : May 2011, Munich, Germany.

• Material Type: 図書
• ISBN: 9780819486790
• ISSN (series): 0277786X
• Title: Modeling aspects in optical metrology 3 : 23-24 May 2011 : Munich, Germany : conference modelling aspects in optical metrology : SPIE optical metrology symposium : May 2011, Munich, Germany.
• Series Title: SPIE Proceedings ; 8083
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8083.
• Author Heading: Bodermann, Bernd.; Bosse, Harald.; Silver, Richard M.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2011.
• Publication Date (W3CDTF): 2011
• Extent: 1 v. (various pagings)
• Other physical details: ill.
• Size: 28 cm.
• Additional Title: SPIE optical metrology.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Optical measurements--Congresses.; Integrated circuits--Congresses.; Semiconductors--Design and construction--Congresses.
• LCC: QC367
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.; "This year, the conference Modelling Aspects in Optical Metrology is organised for the third time (...)" -- introd.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-12-727
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000011272704; http://id.ndl.go.jp/bib/000011272704
• OCLC No.: 754820896; https://www.worldcat.org/oclc/754820896
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 215