図書

CMP技術大系

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CMP技術大系

Call No. (NDL)
ND386-J147
Bibliographic ID of National Diet Library
000011273881
Material type
図書
Author
土肥俊郎, 木下正治 監修ほか
Publisher
グローバルネット
Publication date
2006.6
Material Format
Paper
Capacity, size, etc.
788p ; 27cm
NDC
549.7
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Notes on use

Note (General)：

編集代表: 檜山浩國折り込1枚

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Table of Contents

  • 目次

  • 第1篇 基礎・応用編/ 1

  • 第1章 CMP技術の意義/ 2

  • 第2章 CMP技術の登場と発展/ 10

  • 1 CMPの用語について/ 10

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Paper

Material Type
図書
ISBN
4-907847-13-0
Title
CMP技術大系
Title Transcription
CMP ギジュツ タイケイ
Author/Editor
土肥俊郎, 木下正治 監修
精密工学会「プラナリゼーションCMPとその応用技術専門委員会」 編
Author Heading
土肥, 俊郎, 1947- ドイ, トシロウ, 1947- ( 00413159 )Authorities
木下, 正治 キノシタ, マサハル ( 01239692 )Authorities
精密工学会 セイミツ コウガッカイ ( 00299339 )Authorities
Publication, Distribution, etc.
東京 : グローバルネット
Publication Date
2006.6
Publication Date (W3CDTF)
2006
Extent
788p