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- Material Type
- 雑誌電子資料
- Title Transcription
- マイクロマシン MEMS ギジュツ タイゼン
- Volume
- 2011
- Edition
- CD-ROM版
- Series Title
- Author Heading
- 電子ジャーナル デンシ ジャーナル ( 01045417 )Authorities
- Publication, Distribution, etc.
- Year and volume of publication
- 2011-
- Size
- 12cm