Silicon carbide microsystems for harsh environments / Muthu B. J. Wijesundara, Robert G. Azevedo. (MEMS reference shelf)

Silicon carbide microsystems for harsh environments / Muthu B. J. Wijesundara, Robert G. Azevedo.

(MEMS reference shelf)

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Material Type: 図書
ISBN: 9781441971203 (hbk.)
ISSN (series): 1936-4407
Title: Silicon carbide microsystems for harsh environments / Muthu B. J. Wijesundara, Robert G. Azevedo.
Series Title: MEMS reference shelf
Author Heading: Wijesundara, Muthu B. J.
Azevedo, Robert G.
Publication, Distribution, etc.: New York : Springer
Publication Date: c2011.
Publication Date (W3CDTF): 2011
Extent: xv, 232 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectromechanical systems.
Silicon carbide.
LCC: TK7875
NDLC: ND416
Note (Bibliography): Includes bibliographical references and index.
Holding library: 国立国会図書館
Call No.: ND416-B40
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000011280875
http://id.ndl.go.jp/bib/000011280875
LC Control Number: 2011928695
https://lccn.loc.gov/2011928695
OCLC No.: 746178309
https://www.worldcat.org/oclc/746178309
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 211