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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- パイ デンシケイ ユウキ ブンシ / シリコン セツゴウ カイメン ノ ゴクビ カイセキ ト フクゴウ ソシ セイサク エ ノ テンカイ
- Author/Editor
- 西村高志 [著]
- Author Heading
- 西村, 高志 ニシムラ, タカシ
- Publication, Distribution, etc.
- Publication Date
- [2011]
- Publication Date (W3CDTF)
- 2011
- Extent
- 1冊
- Degree grantor/type
- 北陸先端科学技術大学院大学