2011 22nd annual IEEE/SEMI advanced semiconductor manufacturing conference : (ASMC 2011) : Saratoga Springs, New York, USA : 16-18 May 2011 : May 2011, Saratoga Springs, NY.

Author: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (22nd : 2011 : Saratoga Springs, N.Y.)

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Material Type: 図書
ISBN: 9781612844084 (pbk.)
ISSN: 10788743
Title: 2011 22nd annual IEEE/SEMI advanced semiconductor manufacturing conference : (ASMC 2011) : Saratoga Springs, New York, USA : 16-18 May 2011 : May 2011, Saratoga Springs, NY.
Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (22nd : 2011 : Saratoga Springs, N.Y.)
Publication, Distribution, etc.: Piscataway : IEEE
Publication Date: c2011.
Publication Date (W3CDTF): 2011
Extent: 308 p.
Other physical details: ill.
Size: 27 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors--Design and construction--Congresses.
Semiconductor industry--Congresses.
Process control--Congresses.
DDC: 621.38152
NDLC: M17
Target Audience: 一般
Note (General): Papers.
IEEE cat no CFP11ASC-PRT.
Note (Bibliography): Includes bibliographical references.
Holding library: 国立国会図書館
Call No.: M17-12-915
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000011283547
http://id.ndl.go.jp/bib/000011283547
OCLC No.: 751831888
https://www.worldcat.org/oclc/751831888
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215