Electrolytic in-process dressing (ELID) technologies : fundamentals and applications

• Material Type: 図書
• ISBN: 9781439800362 (hardcover : alk. paper); 1439800367 (hardcover : alk. paper)
• Title: Electrolytic in-process dressing (ELID) technologies : fundamentals and applications
• Author/Editor: edited by Hitoshi Ohmori, Ioan D. Marinescu, Kazutoshi Katahira.
• Author Heading: 大森, 整, 1962- オオモリ, ヒトシ, 1962- ( 00835429 )Authorities; Marinescu, Ioan D.; Katahira, Kazutoshi. [片平和俊]
• Publication, Distribution, etc.: Boca Raton, FL : CRC Press
• Publication Date: c2011.
• Publication Date (W3CDTF): 2011
• Extent: xiii, 249 p.
• Other physical details: ill.
• Size: 24 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductor wafers--Finishing.; Semiconductors--Polishing.; Electrolytic grinding.
• LCC: TK7871.85
• DDC: 621.3815
• NDLC: PD57
• Target Audience: 一般
• Note (Bibliography): Includes bibliographical references and index.
• Collection (particular): 日本関係外国語図書
• Holding library: 国立国会図書館
• Call No.: PD57-B9
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 023211336; http://id.ndl.go.jp/bib/023211336
• OCLC No.: 759815396; https://www.worldcat.org/oclc/759815396
• Bibliographic Record Category (NDL): 211