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博士論文

Fabrication of Zn-In-Sn-O films by combinatorial RF magnetron sputtering system and their application to conventional glass and plastic-based OLED devices

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Fabrication of Zn-In-Sn-O films by combinatorial RF magnetron sputtering system and their application to conventional glass and plastic-based OLED devices

Call No. (NDL)
UT51-2011-Q995
Bibliographic ID of National Diet Library
023542976
Material type
博士論文
Author
Heo Gi-Seok [著]
Publisher
[Heo Gi-Seok]
Publication date
[2011]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
東京工業大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Heo Gi-Seok [著]
Author Heading
許, 起錫 ホ, ギソク
Publication, Distribution, etc.
Publication Date
[2011]
Publication Date (W3CDTF)
2011
Extent
1冊
Alternative Title
コンビナートリアルスパッタシステムを用いたZn-In-Sn-O薄膜作製及びそれを用いたガラス&プラスチック基板上OLED作製への応用 コンビナートリアル スパッタ システム オ モチイタ Zn-In-Sn-O ハクマク サクセイ オヨビ ソレ オ モチイタ ガラス & プラスチック キバンジョウ OLED サクセイ エ ノ オウヨウ
Degree grantor/type
東京工業大学