Polarized Raman spectroscopy for the spatially and tensor-resolved stress analysis of silicon microdevices

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Material Type: 博士論文
Title: Polarized Raman spectroscopy for the spatially and tensor-resolved stress analysis of silicon microdevices
Author/Editor: Takahiro Miyatake [著]
Author Heading: 宮武, 岳洋ミヤタケ, タカヒロ
Publication, Distribution, etc.: [Takahiro Miyatake]
Publication Date: [2011]
Publication Date (W3CDTF): 2011
Extent: 1冊
Degree grantor/type: 京都工芸繊維大学
Date Granted: 平成23年9月26日
Date Granted (W3CDTF): 2011
Dissertation Number: 甲第614号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Target Audience: 一般
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2011-S243
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023625300
http://id.ndl.go.jp/bib/023625300
Bibliographic Record Category (NDL): 213