博士論文

Formation mechanism of extended defects in AlN grown on SiC{0001} and their reduction by initial growth control

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Formation mechanism of extended defects in AlN grown on SiC{0001} and their reduction by initial growth control

Call No. (NDL)
UT51-2012-A341
Bibliographic ID of National Diet Library
023662188
Material type
博士論文
Author
Hironori Okumura [著]
Publisher
[Hironori Okumura]
Publication date
[2012]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
京都大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Hironori Okumura [著]
Author Heading
奥村, 宏典 オクムラ, ヒロノリ
Publication, Distribution, etc.
Publication Date
[2012]
Publication Date (W3CDTF)
2012
Extent
1冊
Alternative Title
SiC{0001}上AlN層における拡張欠陥の発生機構と初期成長制御によるその低減 SiC{0001}ジョウ AlNソウ ニ オケル カクチョウ ケッカン ノ ハッセイ キコウ ト ショキ セイチョウ セイギョ ニ ヨル ソノ テイゲン
Degree grantor/type
京都大学