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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- コウユウデンリツ ゲート ゼツエンマク ノ コウキノウカ ニ ムケタ カガク コウゾウ オヨビ カイメン ハンノウ ニ カンスル ケンキュウ
- Author/Editor
- 山元隆志 [著]
- Author Heading
- 山元, 隆志 ヤマモト, タカシ
- Publication, Distribution, etc.
- Publication Date
- [2012]
- Publication Date (W3CDTF)
- 2012
- Extent
- 1冊
- Alternative Title
- Study on chemical structure and interface reaction of advanced high-k gate dielectrics