図書

Optical microlithography 25 : 13-16 February 2012 : San Jose, California, United States : Feb 2012, San Jose, CA. (SPIE Proceedings ; 8326)

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Optical microlithography 25 : 13-16 February 2012 : San Jose, California, United States : Feb 2012, San Jose, CA.

(SPIE Proceedings ; 8326)

Call No. (NDL)
M17-12-3967
Bibliographic ID of National Diet Library
023805591
Material type
図書
Author
Conley, Willard.
Publisher
SPIE
Publication date
c2012.
Material Format
Paper
Capacity, size, etc.
2 parts ; 28 cm.
NDC
-
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Papers.

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ill. (some col.)

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Paper

Material Type
図書
ISBN (set)
9780819489821 (pbk. : set)
ISSN (series)
0277786X
Author Heading
Publication, Distribution, etc.
Publication Date
c2012.
Publication Date (W3CDTF)
2012