Optical microlithography 25 : 13-16 February 2012 : San Jose, California, United States.

• Material Type: 図書
• ISBN (set): 9780819489821 (pbk. : set)
• ISSN (series): 0277786X
• Title: Optical microlithography 25 : 13-16 February 2012 : San Jose, California, United States.
• Series Title: SPIE Proceedings ; 8326
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8326. 0277-786X
• Author Heading: Conley, Willard.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2012.
• Publication Date (W3CDTF): 2012
• Extent: 2 parts
• Other physical details: ill. (some col.)
• Size: 28 cm.
• Additional Title: SPIE advanced lithography.; Feb 2012, San Jose, CA.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Electronic books.
• Subject Heading: Integrated circuits--Masks--Congresses.; Microlithography--Congresses.; X-ray lithography--Congresses.; Manufacturing processes--Congresses.; Optical microlithography
• LCC: TK7835
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Source: http://link.spie.org/PSISDG/8326/1; http://proceedings.spiedigitallibrary.org/volume.aspx?volumeid=13428
• Holding library: 国立国会図書館
• Call No.: M17-12-3967
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 023805591; http://id.ndl.go.jp/bib/023805591
• OCLC No.: 809934956; https://www.worldcat.org/oclc/809934956
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 215