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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- チョウ テイユウデンリツマク オ モチイタ ビサイ タソウ ハイセン ギジュツ ノ ケンキュウ
- Author/Editor
- 隣真一 [著]
- Author Heading
- 隣, 真一 チカキ, シンイチ
- Publication, Distribution, etc.
- Publication Date
- [2010]
- Publication Date (W3CDTF)
- 2010
- Extent
- 1冊
- Alternative Title
- Study of fine-pitch multilevel interconnects using ultralow-k film