図書

Plasma processing 18 : symposium "plasma processing 18" : 219th meeting of the Electrochemical Society : May 2011, Montréal, Canada. (ECS Transactions ; 35 (no. 20))

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Plasma processing 18 : symposium "plasma processing 18" : 219th meeting of the Electrochemical Society : May 2011, Montréal, Canada.

(ECS Transactions ; 35 (no. 20))

Call No. (NDL)
M17-13-947
Bibliographic ID of National Diet Library
024011613
Material type
図書
Author
Symposium on Plasma Processing (18th : 2011 : Montréal, Québec)ほか
Publisher
Electrochemical Society
Publication date
c2011.
Material Format
Paper
Capacity, size, etc.
v, 33 p. ; 23 cm.
NDC
-
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Notes on use

Note (General)：

Papers.

Other physical details：

ill.

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Paper

Material Type
図書
ISBN
9781607682806 (Softcover)
9781566779227 (PDF)
ISSN
19386737 (online)
21512051 (cd-rom)
ISSN (series)
19385862
Title
Plasma processing 18 : symposium "plasma processing 18" : 219th meeting of the Electrochemical Society : May 2011, Montréal, Canada.
Series Title
ECS Transactions ; 35 (no. 20)
Title Heading
ECS transactions ; v. 35, no. 20.
Author Heading
Symposium on Plasma Processing (18th : 2011 : Montréal, Québec)
Engelhardt, M.
Mathad, G. S.
Hess, Dennis W.
Electrochemical Society. Meeting (219th : 2011 : Montréal, Québec)
Publication, Distribution, etc.
Pennington : Electrochemical Society
Publication Date
c2011.