博士論文

Fluorescent UV-curable resists for UV nanoimprint lithography

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Fluorescent UV-curable resists for UV nanoimprint lithography

Call No. (NDL)
UT51-2012-J445
Bibliographic ID of National Diet Library
024021416
Material type
博士論文
Author
小林敬 [著]
Publisher
[小林敬]
Publication date
[2012]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士 (工学)
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Paper

Material Type
博士論文
Author/Editor
小林敬 [著]
Author Heading
小林, 敬 コバヤシ, ケイ
Publication, Distribution, etc.
Publication Date
[2012]
Publication Date (W3CDTF)
2012
Extent
1冊
Alternative Title
光ナノインプリントリソグラフィ用光硬化性蛍光レジスト ヒカリ ナノインプリント リソグラフィヨウ ヒカリ コウカセイ ケイコウ レジスト
Degree grantor/type
東北大学