Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 6 : 13-14 August 2012 : San Diego, California, United States : instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 6 (conference 8466) : Aug 2012, San Diego, CA. (SPIE Proceedings ; 8466)

Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 6 : 13-14 August 2012 : San Diego, California, United States : instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 6 (conference 8466) : Aug 2012, San Diego, CA.

(SPIE Proceedings ; 8466)

Call No. (NDL): M17-13-1425
Bibliographic ID of National Diet Library: 024129165

Material type: 図書

Author: Postek, Michael T.ほか

Publisher: SPIE

Publication date: c2012.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Selected papers.

Other physical details：: ill.

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Paper

Material Type: 図書
ISBN: 9780819491831
ISSN (series): 0277786X
ISSN (error code): 0277786786X
Title: Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 6 : 13-14 August 2012 : San Diego, California, United States : instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 6 (conference 8466) : Aug 2012, San Diego, CA.
Series Title: SPIE Proceedings ; 8466
Title Heading: SPIE digital library.
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8466. 0277-786X
Author Heading: Postek, Michael T.
Coleman, Victoria Anne, 1981-
Orji, Ndubuisi G.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2012.
Publication Date (W3CDTF): 2012
Extent: 1 v. (various pagings)
Other physical details: ill.
Size: 28 cm.
Additional Title: SPIE optics + photonics.
Place of Publication (Country Code): US
Text Language Code: eng
Genre/Form Terms: Electronic books.
Subject Heading: Nanostructured materials--Congresses.
Microfabrication--Congresses.
Nanotechnology--Congresses.
LCC: TA418.9.N35
NDLC: M17
Target Audience: 一般
Note (General): Selected papers.
Note (Bibliography): Includes bibliographical references and author index.
Source: http://proceedings.spiedigitallibrary.org/volume.aspx?volumeid=14854
http://link.spie.org/PSISDG/8466/1
Holding library: 国立国会図書館
Call No.: M17-13-1425
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024129165
http://id.ndl.go.jp/bib/024129165
OCLC No.: 817939241
https://www.worldcat.org/oclc/817939241
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215