Reliability, packaging, testing, and characterization of MOEMS/MEMS and nanodevices 12 : 4-5 February 2013 : San Francisco, California, United States : Feb 2013, San Francisco, CA.

• Material Type: 図書
• ISBN: 9780819493835
• ISSN (series): 0277786X
• Title: Reliability, packaging, testing, and characterization of MOEMS/MEMS and nanodevices 12 : 4-5 February 2013 : San Francisco, California, United States : Feb 2013, San Francisco, CA.
• Series Title: SPIE Proceedings ; 8614
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8614. 0277-786X
• Author Heading: Ramesham, Rajeshuni.; Shea, Herbert R.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2013.
• Publication Date (W3CDTF): 2013
• Extent: 1 v. (various pagings)
• Other physical details: ill.
• Size: 28 cm.
• Additional Title: SPIE photonics west.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Electronic books.
• Subject Heading: Microelectromechanical systems--Reliability--Congresses.; Microelectromechanical systems--Testing--Congresses.; Microelectronic packaging--Congresses.
• LCC: TK7875
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Source: SPIE Digital Library; http://link.spie.org/PSISDG/8614/1
• Holding library: 国立国会図書館
• Call No.: M17-13-2959
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 024458465; http://id.ndl.go.jp/bib/024458465
• OCLC No.: 847841365; https://www.worldcat.org/oclc/847841365
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 215