Alternative lithographic technologies 5 : 25-28 February 2013 : San Jose, California, United States : Feb 2013, San Jose, CA. (SPIE Proceedings ; 8680)

Alternative lithographic technologies 5 : 25-28 February 2013 : San Jose, California, United States : Feb 2013, San Jose, CA.

(SPIE Proceedings ; 8680)

Call No. (NDL): M17-13-3591
Bibliographic ID of National Diet Library: 024646072

Material type: 図書

Author: Tong, William Man-Wai, 1965-ほか

Publisher: SPIE

Publication date: c2013.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

Other physical details：: ill.

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Paper

Material Type: 図書
ISBN: 9780819494627
ISSN (series): 0277786X
Title: Alternative lithographic technologies 5 : 25-28 February 2013 : San Jose, California, United States : Feb 2013, San Jose, CA.
Series Title: SPIE Proceedings ; 8680
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8680. 0277-786X
Author Heading: Tong, William Man-Wai, 1965-
Resnick, Douglas J.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2013.
Publication Date (W3CDTF): 2013
Extent: 1 v. (various pagings)
Other physical details: ill.
Size: 28 cm.
Additional Title: SPIE advanced lithography.
Place of Publication (Country Code): US
Text Language Code: eng
Genre/Form Terms: Electronic books.
Subject Heading: Extreme ultraviolet lithography--Congresses.
Lithography, Electron beam--Congresses.
Microlithography--Industrial applications--Congresses.
Masks (Electronics)--Congresses.
LCC: TK7872.M3
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Source: SPIE Digital Library
http://link.spie.org/PSISDG/8680/1
Holding library: 国立国会図書館
Call No.: M17-13-3591
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024646072
http://id.ndl.go.jp/bib/024646072
OCLC No.: 847841195
https://www.worldcat.org/oclc/847841195
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215