博士論文

Control of interfacial structures and electrical properties of metal/high-permittivity-rare-earth-oxide/Ge gate stack structures

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Control of interfacial structures and electrical properties of metal/high-permittivity-rare-earth-oxide/Ge gate stack structures

Call No. (NDL)
UT51-2013-B800
Bibliographic ID of National Diet Library
024663630
Material type
博士論文
Author
Kato Kimihiko [著]
Publisher
[Kato Kimihiko]
Publication date
[2013]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
名古屋大学,博士(工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Kato Kimihiko [著]
Author Heading
加藤, 公彦 カトウ, キミヒコ
Publication, Distribution, etc.
Publication Date
[2013]
Publication Date (W3CDTF)
2013
Extent
1冊
Alternative Title
金属/高誘電率希土類酸化物/Geゲートスタック構造の界面構造および電子物性制御 キンゾク
Degree grantor/type
名古屋大学