Fabrication of high-performance polycrystalline silicon thin film transistors at super low-temperature and its new electrical characterization method

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Material Type: 博士論文
Title: Fabrication of high-performance polycrystalline silicon thin film transistors at super low-temperature and its new electrical characterization method
Author/Editor: Emi Machida [著]
Author Heading: 町田, 絵美マチダ, エミ
Publication, Distribution, etc.: [Emi Machida]
Publication Date: [2013]
Publication Date (W3CDTF): 2013
Extent: 1冊
Alternative Title: 高性能多結晶シリコン薄膜トランジスタの超低温作製と新規手法による電子物性評価コウセイノウタケッショウシリコンハクマクトランジスタノチョウテイオンサクセイトシンキシュホウニヨルデンシブッセイヒョウカ
Degree grantor/type: 奈良先端科学技術大学院大学
Date Granted: 平成25年3月22日
Date Granted (W3CDTF): 2013
Dissertation Number: 甲第1141号
Degree Type: 博士(工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Target Audience: 一般
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2013-F431
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024872351
http://id.ndl.go.jp/bib/024872351
Bibliographic Record Category (NDL): 213