博士論文

Application of boron cluster ion implantation to pMOSFET

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Application of boron cluster ion implantation to pMOSFET

Call No. (NDL)
UT51-2013-G85
Bibliographic ID of National Diet Library
024914583
Material type
博士論文
Author
Yoji Kawasaki [著]
Publisher
[Yoji Kawasaki]
Publication date
[2012]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
広島大学,博士(工学)
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Paper

Material Type
博士論文
Title
Application of boron cluster ion implantation to pMOSFET
Author/Editor
Yoji Kawasaki [著]
Author Heading
川崎, 洋司 カワサキ, ヨウジ
Publication, Distribution, etc.
[Yoji Kawasaki]
Publication Date
[2012]
Publication Date (W3CDTF)
2012
Extent
1冊
Alternative Title
クラスタボロン注入のpMOSFETへの適用に関する研究 クラスタ ボロン チュウニュウ ノ pMOSFET エ ノ テキヨウ ニ カンスル ケンキュウ
Degree grantor/type
広島大学