Micromachining and microfabrication process technology XIX : 4-6 February 2014 : San Francisco, California, United States : Feb 2014, San Francisco, CA.

• Material Type: 図書
• ISBN: 9780819498861; 0819498866
• ISSN (series): 0277-786X
• Title: Micromachining and microfabrication process technology XIX : 4-6 February 2014 : San Francisco, California, United States : Feb 2014, San Francisco, CA.
• Series Title: SPIE Proceedings ; 8973
• Author Heading: Maher, Mary Ann.; Resnick, Paul J.
• Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
• Publication Date: [2014]
• Publication Date (W3CDTF): 2014
• Extent: 1 volume (various pagings)
• Other physical details: illustrations (black and white)
• Size: 28 cm.
• Alternative Title: Micromachining and microfabrication process technology 19 : 4-6 February 2014 : San Francisco, California, United States; SPIE photonics west
• Place of Publication (Country Code): US
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Micromachining--Congresses.; Microfabrication--Congresses.
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-14-2667
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 025446118; http://id.ndl.go.jp/bib/025446118
• OCLC No.: 883423523; https://www.worldcat.org/oclc/883423523
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215