図書

Reliability, packaging, testing, and characterization of MOEMS/MEMS, nanodevices, and nanomaterials XIII : 3-4 February 2014 : San Francisco, California, USA : MOEMS-MEMS symposium : Feb 2014, San Francisco, CA. (SPIE Proceedings ; 8975)

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Reliability, packaging, testing, and characterization of MOEMS/MEMS, nanodevices, and nanomaterials XIII : 3-4 February 2014 : San Francisco, California, USA : MOEMS-MEMS symposium : Feb 2014, San Francisco, CA.

(SPIE Proceedings ; 8975)

Call No. (NDL)
M17-14-2670
Bibliographic ID of National Diet Library
025446154
Material type
図書
Author
Shea, Herbert R.ほか
Publisher
SPIE
Publication date
[2014]
Material Format
Paper
Capacity, size, etc.
1 volume (various pagings) ; 28 cm.
NDC
-
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illustrations (black and white)

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Paper

Material Type
図書
ISBN
9780819498885 (paperback)
0819498882 (paperback)
ISSN (series)
0277-786X
Title
Reliability, packaging, testing, and characterization of MOEMS/MEMS, nanodevices, and nanomaterials XIII : 3-4 February 2014 : San Francisco, California, USA : MOEMS-MEMS symposium : Feb 2014, San Francisco, CA.
Series Title
SPIE Proceedings ; 8975
Author Heading
Shea, Herbert R.
Ramesham, Rajeshuni.
Publication, Distribution, etc.
Bellingham, Washington, USA : SPIE (出版)
Publication Date
[2014]
Publication Date (W3CDTF)
2014
Extent
1 volume (various pagings)