Reliability, packaging, testing, and characterization of MOEMS/MEMS, nanodevices, and nanomaterials XIII : 3-4 February 2014 : San Francisco, California, USA : MOEMS-MEMS symposium : Feb 2014, San Francisco, CA.

• Material Type: 図書
• ISBN: 9780819498885 (paperback); 0819498882 (paperback)
• ISSN (series): 0277-786X
• Title: Reliability, packaging, testing, and characterization of MOEMS/MEMS, nanodevices, and nanomaterials XIII : 3-4 February 2014 : San Francisco, California, USA : MOEMS-MEMS symposium : Feb 2014, San Francisco, CA.
• Series Title: SPIE Proceedings ; 8975
• Author Heading: Shea, Herbert R.; Ramesham, Rajeshuni.
• Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
• Publication Date: [2014]
• Publication Date (W3CDTF): 2014
• Extent: 1 volume (various pagings)
• Other physical details: illustrations (black and white)
• Size: 28 cm.
• Alternative Title: Reliability, packaging, testing, and characterization of MOEMS/MEMS, nanodevices, and nanomaterials 13 : 3-4 February 2014 : San Francisco, California, USA; SPIE photonics west
• Place of Publication (Country Code): US
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Microelectromechanical systems--Reliability--Congresses.; Microelectromechanical systems--Testing--Congresses.; Microelectronic packaging--Congresses.; Nanodevices; Nanomaterials; MEMS; MOEMS
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-14-2670
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 025446154; http://id.ndl.go.jp/bib/025446154
• OCLC No.: 883423417; https://www.worldcat.org/oclc/883423417
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215