Metrology, inspection, and process control for microlithography XXVIII : 24-27 February 2014 : San Jose, California, United States : Feb 2014, San Jose, CA.

• Material Type: 図書
• ISBN (set): 9780819499738 (paperback : set)
• ISSN (series): 0277-786X
• Title: Metrology, inspection, and process control for microlithography XXVIII : 24-27 February 2014 : San Jose, California, United States : Feb 2014, San Jose, CA.
• Series Title: SPIE Proceedings ; 9050
• Author Heading: Metrology Inspection and Process Control for Microlithography (28th : 2014 : San Jose, Calif.); Cain, Jason P.; Sanchez, Martha I.
• Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
• Publication Date: [2014]
• Publication Date (W3CDTF): 2014
• Extent: 2 volumes
• Other physical details: illustrations
• Size: 28 cm.
• Alternative Title: Metrology, inspection, and process control for microlithography 28 : 24-27 February 2014 : San Jose, California, United States; SPIE advanced lithography
• Place of Publication (Country Code): US
• Text Language Code: eng
• Content Type: txt : text
• Media Type: n : unmediated
• Carrier Type: nc : volume
• Subject Heading: Integrated circuits--Inspection--Congresses.; Integrated circuits--Measurement--Congresses.; Microlithography--Congresses.
• LCC: TK7874
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-15-134
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 025576998; http://id.ndl.go.jp/bib/025576998
• LC Control Number: 2014469620; https://lccn.loc.gov/2014469620
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215