Chemical mechanical polishing 12 : 12th chemical mechanical polishing symposium (CMP 12) : 222nd meeting of the ECS : Oct 2012, Honolulu, HI. (ECS Transactions ; 50 (no. 39))

Chemical mechanical polishing 12 : 12th chemical mechanical polishing symposium (CMP 12) : 222nd meeting of the ECS : Oct 2012, Honolulu, HI.

(ECS Transactions ; 50 (no. 39))

Call No. (NDL): M17-14-3083
Bibliographic ID of National Diet Library: 025753757

Material type: 図書

Author: Electrochemical Society.

Publisher: The Electrochemical Society

Publication date: [2013]

Material Format: Paper

Capacity, size, etc.: vi, 91 pages ; 23 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 9781623320751 (Softcover)
ISSN (series): 1938-5862
Title: Chemical mechanical polishing 12 : 12th chemical mechanical polishing symposium (CMP 12) : 222nd meeting of the ECS : Oct 2012, Honolulu, HI.
Series Title: ECS Transactions ; 50 (no. 39)
Author Heading: Electrochemical Society.
Publication, Distribution, etc.: Pennington, NJ, USA : The Electrochemical Society (出版)
Publication Date: [2013]
Publication Date (W3CDTF): 2013
Extent: vi, 91 pages
Size: 23 cm.
Alternative Title: Dielectric and semiconductor materials, devices, and processing
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-14-3083
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025753757
http://id.ndl.go.jp/bib/025753757
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215