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博士論文

Continuous-membrane single-crystal-silicon mirrors for adaptive optics fabricated by wafer bonding process

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Continuous-membrane single-crystal-silicon mirrors for adaptive optics fabricated by wafer bonding process

Call No. (NDL)
UT51-2014-B741
Bibliographic ID of National Diet Library
025857249
Material type
博士論文
Author
Tong Wu [著]
Publisher
[Tong Wu]
Publication date
[2013]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士(工学)
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Paper

Material Type
博士論文
Author/Editor
Tong Wu [著]
Author Heading
呉, 同 ゴ, ドウ
Publication, Distribution, etc.
Publication Date
[2013]
Publication Date (W3CDTF)
2013
Extent
1冊
Alternative Title
ウエハ接合を用いた連続メンブレン単結晶シリコン補償光学ミラー ウエハ セツゴウ オ モチイタ レンゾク メンブレン タンケッショウ シリコン ホショウ コウガク ミラー
Degree grantor/type
東北大学