30th European mask and lithography conference : 24-25 June 2014 : Dresden, Germany : EMLC2014 : EMLC 2014 : Jun 2014, Dresden, Germany. (SPIE Proceedings ; 9231)

30th European mask and lithography conference : 24-25 June 2014 : Dresden, Germany : EMLC2014 : EMLC 2014 : Jun 2014, Dresden, Germany.

(SPIE Proceedings ; 9231)

Call No. (NDL): M17-15-328
Bibliographic ID of National Diet Library: 026033224

Material type: 図書

Author: VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik.

Publisher: SPIE

Publication date: [2014]

Material Format: Paper

Capacity, size, etc.: 1 volume (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers."The conference has annually brought together ..."--Foreword.

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Paper

Material Type: 図書
ISBN: 9781628412857
ISSN (series): 0277-786X
Title: 30th European mask and lithography conference : 24-25 June 2014 : Dresden, Germany : EMLC2014 : EMLC 2014 : Jun 2014, Dresden, Germany.
Series Title: SPIE Proceedings ; 9231
Author Heading: VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik.
Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
Publication Date: [2014]
Publication Date (W3CDTF): 2014
Extent: 1 volume (various pagings)
Size: 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Papers.
"The conference has annually brought together ..."--Foreword.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-15-328
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 026033224
http://id.ndl.go.jp/bib/026033224
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215