Modeling aspects in optical metrology V : 23-25 June 2015 : Munich, Germany : Jun 2015, Munich, Germany.

• Material Type: 図書
• ISBN: 9781628416862; 1628416866
• ISSN (series): 0277-786X
• Title: Modeling aspects in optical metrology V : 23-25 June 2015 : Munich, Germany : Jun 2015, Munich, Germany.
• Series Title: SPIE Proceedings ; 9526
• Title Heading: Proceedings of SPIE--the International Society for Optical Engineering ; 9526.
• Author Heading: Bodermann, Bernd.; Frenner, Karsten.; Silver, Richard M.; European Optical Society (EOS); Wissenschaftliche Gesellschaft Lasertechnik (WLT)
• Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
• Publication Date: [2015]
• Publication Date (W3CDTF): 2015
• Extent: 1 volume (various pagings)
• Other physical details: illustrations
• Size: 28 cm.
• Alternative Title: Modeling aspects in optical metrology 5 : 23-25 June 2015 : Munich, Germany; SPIE. optical metrology
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Conference papers and proceedings.
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Optical measurements--Congresses.; Integrated circuits--Congresses.; Semiconductors--Design and construction--Congresses.; Integrated circuits.; Optical measurements.; Semiconductors--Design and construction.
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-15-3191
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 026703764; http://id.ndl.go.jp/bib/026703764
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215