図書

マイクロ・ナノデバイスのエッチング技術 普及版 (新材料・新素材シリーズ)

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マイクロ・ナノデバイスのエッチング技術 = Etching for Micro/Nano Fabrication

普及版

(新材料・新素材シリーズ)

Call No. (NDL)
ND371-L82
Bibliographic ID of National Diet Library
027135143
Material type
図書
Author
式田光宏, 佐藤一雄, 田中浩 監修
Publisher
シーエムシー出版
Publication date
2016.3
Material Format
Paper
Capacity, size, etc.
301p ; 26cm
NDC
549.7
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Tokai-Hokuriku

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Paper

Material Type
図書
ISBN
978-4-7813-1101-2
Title Transcription
マイクロ ナノデバイス ノ エッチング ギジュツ
Author/Editor
式田光宏, 佐藤一雄, 田中浩 監修
Edition
普及版
Author Heading
式田, 光宏 シキダ, ミツヒロ ( 01180864 )Authorities
佐藤, 一雄, 1948- サトウ, カズオ, 1948- ( 00865926 )Authorities
田中, 浩 タナカ, ヒロシ ( 01180867 )Authorities
Publication, Distribution, etc.
Publication Date
2016.3