2014 international conference on planarization/CMP technology : (ICPT 2014) : Kobe, Japan : 19-21 November 2014 : 11th ICPT2014 : Nov 2014, Kobe, Japan.

• Material Type: 図書
• ISBN: 9781479955589
• Title: 2014 international conference on planarization/CMP technology : (ICPT 2014) : Kobe, Japan : 19-21 November 2014 : 11th ICPT2014 : Nov 2014, Kobe, Japan.
• Author Heading: International Conference on Planarization/CMP Technology (11th : 2014 : Kōbe-shi, Japan); Japan Society of Precision Engineering. Japan Planarization and CMP Technical Committee.
• Publication, Distribution, etc.: Piscataway, NJ : IEEE (出版)
• Publication Date: [2014]; 著作権日付 : ©2014
• Publication Date (W3CDTF): 2014
• Extent: 355 pages
• Other physical details: illustrations
• Size: 28 cm
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Conference papers and proceedings.
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Chemical mechanical planarization--Congresses.; Chemical mechanical planarization.
• LCC: TK7871.85
• NDLC: M17
• Target Audience: 一般
• Note (General): Abstracts and papers.; IEEE catalog number CFP1463Z-POD.
• Note (Content): Annotation
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-16-1821
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 027422296; http://id.ndl.go.jp/bib/027422296
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215