Metrology, inspection, and process control for microlithography XXX : 22-25 February 2016 : San Jose, California, United States : 30th conference on metrology, inspection, and process control for microlithography : Feb 2016, San Jose, CA. (SPIE Proceedings ; 9778)

Metrology, inspection, and process control for microlithography XXX : 22-25 February 2016 : San Jose, California, United States : 30th conference on metrology, inspection, and process control for microlithography : Feb 2016, San Jose, CA.

(SPIE Proceedings ; 9778)

Call No. (NDL): M17-17-2705
Bibliographic ID of National Diet Library: 027535184

Material type: 図書

Author: -

Publisher: SPIE

Publication date: [2016]

Material Format: Paper

Capacity, size, etc.: 2 volumes ; 28 cm.

NDC: -

View All

Notes on use

Note (General)：: Papers.

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
ISBN (set): 9781510600133 (set)
ISSN (series): 0277-786X
Title: Metrology, inspection, and process control for microlithography XXX : 22-25 February 2016 : San Jose, California, United States : 30th conference on metrology, inspection, and process control for microlithography : Feb 2016, San Jose, CA.
Series Title: SPIE Proceedings ; 9778
Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
Publication Date: [2016]
Publication Date (W3CDTF): 2016
Extent: 2 volumes
Size: 28 cm.
Alternative Title: Metrology, inspection, and process control for microlithography 30 : 22-25 February 2016 : San Jose, California, United States
SPIE. advanced lithography
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-17-2705
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 027535184
http://id.ndl.go.jp/bib/027535184
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215