図書

Silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications 5 : international symposium on silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications 5 : 227th meeting of the Electrochemical Society : May 2015, Chicago, IL. (ECS Transactions ; 66 (no. 4))

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Silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications 5 : international symposium on silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications 5 : 227th meeting of the Electrochemical Society : May 2015, Chicago, IL.

(ECS Transactions ; 66 (no. 4))

Call No. (NDL)
M17-17-873
Bibliographic ID of National Diet Library
027587507
Material type
図書
Author
-
Publisher
The Electrochemical Society
Publication date
[2015]
Material Format
Paper
Capacity, size, etc.
ix, 326 pages ; 24 cm.
NDC
-
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Selected papers."The themes of this annual symposium continue to ..."--Preface.

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Paper

Material Type
図書
ISBN
9781623322373
ISSN (series)
1938-5862
Title
Silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications 5 : international symposium on silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications 5 : 227th meeting of the Electrochemical Society : May 2015, Chicago, IL.
Series Title
ECS Transactions ; 66 (no. 4)
Publication, Distribution, etc.
Pennington, NJ, USA : The Electrochemical Society (出版)
Publication Date
[2015]
Publication Date (W3CDTF)
2015
Extent
ix, 326 pages
Size
24 cm.