2015 26th annual SEMI advanced semiconductor manufacturing conference : (ASMC 2015) : Saratoga Springs, New York, USA : 3-6 May 2015 : May 2015, Saratoga Springs, NY.

• Material Type: 図書
• ISBN: 9781479999316 (print)
• Title: 2015 26th annual SEMI advanced semiconductor manufacturing conference : (ASMC 2015) : Saratoga Springs, New York, USA : 3-6 May 2015 : May 2015, Saratoga Springs, NY.
• Author Heading: Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (26th : 2015 : Saratoga Springs, N.Y.)
• Publication, Distribution, etc.: Piscataway, NJ : IEEE (出版)
• Publication Date: [2015]
• Publication Date (W3CDTF): 2015
• Extent: 459 pages
• Other physical details: illustrations
• Size: 28 cm
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Conference papers and proceedings.
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Semiconductors--Design and construction--Congresses.; Semiconductor industry--Production control--Congresses.; Semiconductor industry--Management--Congresses.; Process control--Congresses.; Process control.; Semiconductor industry--Management.; Semiconductor industry--Production control.; Semiconductors--Design and construction.
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.; IEEE catalog number CFP15ASC-POD.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-17-1725
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 027720275; http://id.ndl.go.jp/bib/027720275
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215