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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- カガク キソウ セキシュツホウ ニ ヨル タンカ ケイソマク ノ コウソク ゴウセイ ト ビサイ コウゾウ
- Author/Editor
- 韓明旭 [著]
- Author Heading
- 韓, 明旭 カン, メイキョク
- Publication, Distribution, etc.
- Publication Date
- [2016]
- Publication Date (W3CDTF)
- 2016
- Extent
- 1冊
- Alternative Title
- High-speed deposition and microstructure of silicon carbide film by chemical vapor deposition